专利名称：Method of manufacturing a electrode of
capacitor
发明人：Takashi Nakamura申请号：US10393001申请日：20030512公开号：US06730525B2公开日：20040504
专利附图：
摘要：An organic compound of a noble metal is dissolved in an alcohol to make acoating agent wherein the electrode material configuring a lower electrode is liquefied.On the surface of a substrate the coating agent is applied by spin coating to a thickness
of 100 to 1000 Å or so. Heating is performed, using a drying apparatus such as a hot plateor oven to a temperature of 400 to 600° C., and the halogen and organic solvent areevaporated. Even then there is foreign matter underneath, a lower electrode is formedhaving a flattened surface. On the surface of the lower electrode are formed PZT and anupper electrode . Heat treatment is then performed in an oxidizing atmosphere at a hightemperature of 650 to 850° C. or so. The ferroelectric material is subjected to
crystallization. A lower electrode of a ferroelectric layer having a flat surface is formed.
申请人：ROHM CO., LTD.
代理机构：Merchant & Gould P.C.
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